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물중탕 식각 공정을 이용한 대면적 실리콘 나이트라이드 극자외선 노광공정용 펠리클 제작
- Authors
- 안진호
- Issue Date
- 21-Apr-2016
- Place
- 전북대학교
- Conference Name
- 반도체디스플레이춘계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)