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EUV 리소그래피 시뮬레이션을 통한 SRAF 적용 마스크의 공정 허용도 최적화
- Authors
- 안진호
- Issue Date
- 23-Feb-2016
- Place
- 강원도 하이원리조트
- Conference Name
- 제 23회 한국 반도체 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)