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The Impacts of PEALD TiN Process on The Effective Work-Function in the HKMG Devices
- Authors
- 최창환
- Issue Date
- 20-Jan-2016
- Publisher
- Harbin Institute of Technology
- Citation
- International Symposium on Fusion Tech 2016
- Conference Name
- International Symposium on Fusion Tech 2016
- Place
- Harbin, China
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)