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Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 7-Dec-2015
- Place
- JWMarriott Hotel, Dubai
- Conference Name
- 4th Nano Today Conference
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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