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Control of Thermally Activated Ta Atom Diffusion Behavior Employing Ta Layer Thicknesses and Diffusion Sponge Function of TaOx Layer

Authors
홍진표
Issue Date
23-Apr-2015
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/40757
Place
대전 컨벤션 센터
Conference Name
한국 물리학회
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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