Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

High-Speed RF/Plasma Diagnostic and Control Technology in Plasma Enhanced Atomic Layer Deposition (PEALD) Process

Authors
정진욱
Issue Date
30-Mar-2015
Publisher
The Japan Society of Applied Physics
Citation
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/40998
Conference Name
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Place
Nagoya University, Nagoya, Japan
Files in This Item
There are no files associated with this item.
Appears in
Collections
서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Chung, Chin Wook photo

Chung, Chin Wook
COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
Read more

Altmetrics

Total Views & Downloads

BROWSE