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Design and Development of a Hollow-Anode Discharge Source for Sputtering Process
- Authors
- 정규선
- Issue Date
- 11-Dec-2014
- Publisher
- The Korean Physical Society
- Citation
- The 17th International Symposium on the Physics of Semiconductors and Applications
- Conference Name
- The 17th International Symposium on the Physics of Semiconductors and Applications
- Place
- 제주도/대한민국
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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