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Poly(acrylic acid)-Poly(ethylene oxide) Complexation for Low Dishing in STI CMP
- Authors
- 백운규
- Issue Date
- 19-Nov-2014
- Place
- Kobe, Japan
- Conference Name
- International Conference on Planarization/CMP Technology 2014
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)