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Experimental investigation of plasma parameter profiles on wafer level with dis-charge gap lengths in an inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 4-Nov-2014
- Publisher
- American Physical Society
- Citation
- 67th Annual Gaseous Electronics Conference
- Conference Name
- 67th Annual Gaseous Electronics Conference
- Place
- Raleigh, NC
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)