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The detection of the mass sensitivity for SiN surrounded doubly-clamped Si microbeam resonators

Authors
이성재
Issue Date
23-Oct-2014
Publisher
한국물리학회
Citation
한국물리학회 가을학술논문대회
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/42597
Conference Name
한국물리학회 가을학술논문대회
Place
광주
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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Lee, Seong Jae
COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF PHYSICS)
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