Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Deposition characterization of Al2O3 thin films by novel method of Atomic Layer Deposition
- Authors
- 성명모
- Issue Date
- 18-Aug-2014
- Publisher
- Korea Nano Technology Research Society
- Citation
- Nano Korea 2014
- Conference Name
- Nano Korea 2014
- Place
- 서울 COEX
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)