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실리콘 질화막 앵커로 감싸인 양단이 고정된 실리콘 빔 질량센서의 제작 및 특성
- Authors
- 이성재
- Issue Date
- 4-Apr-2014
- Publisher
- 마이크로 나노시스템 학회
- Citation
- The 16th Korean MEMS conference
- Conference Name
- The 16th Korean MEMS conference
- Place
- 제주도
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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