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Organic-inorganic hybrid gate dielectrics with improved dielectric properties via uv treatment for flexible electronics
- Authors
- Hur, Jaeseok; Kim, Jeongoh; Kim, Hyeona; Jeong, Jae Kyeong
- Issue Date
- Dec-2018
- Publisher
- International Display Workshops
- Keywords
- Dielectric; DUV; Hybrid; Low temperature; Polymer
- Citation
- Proceedings of the International Display Workshops, v.3, pp.1542 - 1544
- Indexed
- SCOPUS
- Journal Title
- Proceedings of the International Display Workshops
- Volume
- 3
- Start Page
- 1542
- End Page
- 1544
- ISSN
- 1883-2490
- Abstract
- Metal-insulator-metal (MIM) capacitors with poly(4-vinylphenol-co-methylmethacrylate) (PVP-co-PMMA) based organic-inorganic hybrid gate dielectrics were fabricated at a low temperature (150 'C) after DUV treatment. The resulting hybrid dielectric f?lms showed a low leakage current density, a high breakdown E-field strength, and a high dielectric constant via DUV treatment.
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Related Researcher
- Jeong, Jae Kyeong
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)