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Effect of Radio Frequency Bias on the Plasma Density and Electron Heating in Inductive Discharge
- Authors
- 정진욱
- Issue Date
- 30-Sep-2013
- Publisher
- American Physical Society (APS)
- Citation
- 66th Gaseous Electronics Conference
- Conference Name
- 66th Gaseous Electronics Conference
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)