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Effect of Al2O3/ZrO2 Nanolaminate Deposited by Remote Plasma Atomic Layer Deposition for Moisture Barrier Properties

Authors
전형탁
Issue Date
20130524
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48070
Place
여수 엠블호텔(THE MVL)
Conference Name
춘계학술발표대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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