Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
평판형 탐침을 이용한 공정 챔버 벽 증착 막 두께 측정
- Authors
- 정진욱
- Issue Date
- 18-Feb-2013
- Publisher
- 한국진공학회
- Citation
- 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
- Conference Name
- 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
- Place
- 휘닉스파크
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)