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극판 전극이 인가된 유도 결합 플라즈마에서 유도 결합 전기장과 용량성 결합 전기장에 관한 전자 가열 연구
- Authors
- 정진욱
- Issue Date
- 18-Feb-2013
- Place
- 휘닉스파크
- Conference Name
- 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)