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Work-Function Modulation and Further EOT scaling of High-K/Metal Gate Device
- Authors
- 최창환
- Issue Date
- 30-Jan-2013
- Publisher
- SEMI
- Citation
- Semicon Korea 2013 (SEMI)-SEMI Technology Symposium
- Conference Name
- Semicon Korea 2013 (SEMI)-SEMI Technology Symposium
- Place
- COEX, SEOUL
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)