Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Study of Slurry pH and oxidizer on Ge-doped SbTe film in PRAM CMP
- Authors
- 박재근
- Issue Date
- 8-Nov-2012
- Place
- 라카이 샌드파인 리조트
- Conference Name
- 한국재료학회 2012년도 추계학술대회
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.