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수직 기류에서 포토마스크 표면으로의 입자침착속도에 관한 연구
- Authors
- 육세진
- Issue Date
- 6-Nov-2012
- Place
- 과학기술회관
- Conference Name
- 2012년도 클린룸과 오염제어기술 심포지움
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)