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Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled plasmas under a weakly collisional and nonlocal electron kinetic regime
- Authors
- 정진욱
- Issue Date
- 22-Oct-2012
- Publisher
- American Physical Society
- Citation
- 65th Gaseous Electronics Conference
- Conference Name
- 65th Gaseous Electronics Conference
- Place
- Austin
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)