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Rapid Vapor Deposition of SiOx Films on Low Deposition Temperature
- Authors
- 박진성
- Issue Date
- 26-Aug-2012
- Publisher
- 한국재료학회, IUMRS
- Citation
- International Union of Materials Research Societies -International Conference in Asia 2012
- Conference Name
- International Union of Materials Research Societies -International Conference in Asia 2012
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)