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RF-Magnetron Sputtered Chalcopyrite Cu2ZnSnS4 Thin Film Using Single Quaternary Sputtering Target Prepared by Sintering Process

Authors
최창환
Issue Date
5-Jul-2012
Publisher
The Korean Vacuum Society
Citation
The Fourth International Conference on Microelectronics and Plasma Technology (ICMAP)
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/51197
Conference Name
The Fourth International Conference on Microelectronics and Plasma Technology (ICMAP)
Place
Jeju, Korea
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Choi, Chang hwan
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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