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자기장을 인가한 솔레노이드형 유도 결합 플라즈마 장치에서의 전자 싸이클로트론 공명 플라즈마 특성

Authors
정진욱
Issue Date
10-Feb-2012
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/52669
Place
보광휘닉스 파크
Conference Name
한국진공학회 동계 정기 학술 대회
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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