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Uniformity Control by using helium gas in the large area ferrite side type inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 10-Feb-2012
- Publisher
- 한국진공학회
- Citation
- 한국진공학회 동계 정기학술대회 프로그램집
- Conference Name
- 한국진공학회 동계 정기학술대회 프로그램집
- Place
- 보광휘닉스파크
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)