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The Role Of Oxygen in High-k and Metal Gate (HKMG) Device for Work Function Tuning
- Authors
- 최창환
- Issue Date
- 16-Dec-2011
- Publisher
- Dalian University of Technology
- Citation
- International Symposium on Fusion Technololgy
- Conference Name
- International Symposium on Fusion Technololgy
- Place
- Dalian, China
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)