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The effect of collision frequency on the electric field distribution in a high frequency capacitive discharge
- Authors
- 정진욱
- Issue Date
- 15-Nov-2011
- Publisher
- APS physics
- Citation
- 64th Annual Gaseous Electronics Conference
- Conference Name
- 64th Annual Gaseous Electronics Conference
- Place
- Salt Lake City, Utah
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- There are no files associated with this item.
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)