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A Etching Study of Sputtered TiN Gate Electrode
- Authors
- 최창환
- Issue Date
- 28-Oct-2011
- Publisher
- 대한금속재료학회
- Citation
- 대한금속재료학회 추계학술대회
- Conference Name
- 대한금속재료학회 추계학술대회
- Place
- 대전 컨벤션센터
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)