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Transparent Al doped ZnO oxide thin film transistor deposited by low temperature atomic layer deposition

Authors
박진성
Issue Date
26-Jun-2011
Publisher
ALD 2011
Citation
11th International Conference on Atomic Layer Deposition(ALD 2011)
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/54901
Conference Name
11th International Conference on Atomic Layer Deposition(ALD 2011)
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Park, Jinseong
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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