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다양한 공정 주파수에서 유도 결합 플라즈마의 플라즈마 밀도와 에너지 전달 효율 측정
- Authors
- 정진욱
- Issue Date
- 9-Feb-2011
- Place
- 한국, 강원도 평창
- Conference Name
- 제40회 한국진공학회 동계정기학술대회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)