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Plasma etching of silicon-related materials with non-global warming gas of CF3I for in-situ chamber cleaning
- Authors
- 안진호
- Issue Date
- 20210707
- Place
- 일산 KINTEX / 온라인 개최
- Conference Name
- NANO KOREA 2021
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)