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Investigation of the effect of plasma treatments in various ambients on the electrical properties of MIS structure by RPALD
- Authors
- 전형탁
- Issue Date
- 20100823
- Place
- KINTEX , GyeongGi-Do, Korea
- Conference Name
- IUMRS-ICEM 2010
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)