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Effects of flow rate on the plasma parameters in plasma process reactor

Authors
정진욱
Issue Date
4-Jul-2010
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58223
Place
Jeju, Korea
Conference Name
The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)
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