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유도 결합플라즈마에서의 기체 유량에 따른 전자에너지 분포의 전이
- Authors
- 정진욱
- Issue Date
- 17-Feb-2010
- Publisher
- 한국진공학회(The Korean Vacuum Society)
- Citation
- 동계정기 학술대회
- Conference Name
- 동계정기 학술대회
- Place
- 한국, 강원도 횡성
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)