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원자층 증착법을 이용하여 형성한 Al2O3 유전체를 이용한 Indium Gallium Zinc Oxide 박막 트랜지스터의 특성

Authors
전형탁
Issue Date
12-Nov-2009
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/60097
Place
서울산업대학교 서울테크노파크
Conference Name
2009년도 추계 학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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