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Effects of Post Annealing on the Properties of AL2O3/HfO/ZnO Thin Film Transistor Deposition by Atomic Layer Deposition

Authors
전형탁
Issue Date
20091105
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/60228
Place
Mokpo National University, KOREA
Conference Name
GJ-NST 2009, International Conference on Nano Science and Nano Technology
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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