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Spectroscopic measurement of the electron temperature by using a simple collisional-radiative model in inductive Ar/O2 mixture discharge
- Authors
- 정진욱
- Issue Date
- 23-Sep-2009
- Publisher
- The Korean Vacuum Society
- Citation
- 2nd International Conference on Microelectronics and Technology
- Conference Name
- 2nd International Conference on Microelectronics and Technology
- Place
- Busan, Korea
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)