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New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition

Authors
성명모
Issue Date
4-Nov-2008
Publisher
Material Research Society & Asianano 2008
Citation
The 2008 Asian Conference on Nanoscience and Nanotechnology
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/63137
Conference Name
The 2008 Asian Conference on Nanoscience and Nanotechnology
Place
싱가폴 Biopolis
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서울 자연과학대학 > 서울 화학과 > 2. Conference Papers

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