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Metal-Insulator-Metal Capacitors Using Atomic Layer Deposited Al2O3 and HfO2 Dielectrics
- Authors
- 안진호
- Issue Date
- 18-Oct-2008
- Place
- USA
- Conference Name
- PRIME Meeting on Electrochemical and Solid-State Science
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)