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Thin Film Encapsulation using SiOx/SiNxOy multilayer structures via Low-Temperature Plasma-Enhanced Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진성 | - |
| dc.date.accessioned | 2021-07-30T08:24:10Z | - |
| dc.date.available | 2021-07-30T08:24:10Z | - |
| dc.date.created | 2021-07-01 | - |
| dc.date.issued | 2020-11-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6677 | - |
| dc.publisher | 한국세라믹학회 | - |
| dc.title | Thin Film Encapsulation using SiOx/SiNxOy multilayer structures via Low-Temperature Plasma-Enhanced Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 박진성 | - |
| dc.identifier.bibliographicCitation | 2020년 한국세라믹학회 추계학술대회 | - |
| dc.relation.isPartOf | 2020년 한국세라믹학회 추계학술대회 | - |
| dc.citation.title | 2020년 한국세라믹학회 추계학술대회 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)