Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Thin Film Encapsulation using SiOx/SiNxOy multilayer structures via Low-Temperature Plasma-Enhanced Atomic Layer Deposition
- Authors
- 박진성
- Issue Date
- 23-Nov-2020
- Publisher
- 한국세라믹학회
- Citation
- 2020년 한국세라믹학회 추계학술대회
- Conference Name
- 2020년 한국세라믹학회 추계학술대회
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)