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Super-Cycle 기반의 ALD TaAlN 금속 박막 형성 및 특성
- Authors
- 최창환
- Issue Date
- 19-Nov-2020
- Publisher
- 한국재료학회
- Citation
- 한국재료학회 춘추계 톻합학술대회
- Conference Name
- 한국재료학회 춘추계 톻합학술대회
- Place
- 제주 휘닉스 섭지코지
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)