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Effect of microwave irradiation on electrical and optical properties of ZnO thin films growth by atomic layer deposition

Authors
전형탁
Issue Date
19-Nov-2020
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6776
Place
휘닉스 제주 섭지코지
Conference Name
2020 한국재료학회 춘,추계통합학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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