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차세대 플라즈마 원자층증착을 이용한 고품질 자기정렬다중패터닝 spacer 원천기술 개발
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- 전형탁
- Issue Date
- 20201116
- Place
- 서울 코엑스
- Conference Name
- 미래반도체소자 2020년 하반기 총괄워크숍
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)