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Plasma effect of HfO2 Thin Film Deposited by O2 and O2+Ar Mixed lasma-Enhanced Atomic Layer Deposition (PEALD)
- Authors
- 전형탁
- Issue Date
- 13-Sep-2006
- Place
- Hotel Shilla, Jeju
- Conference Name
- IUMRS International Conference in Asia 2006 (IUMRS-ICA-2006) meeting
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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