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Electrical and plasma parameters of distributed ICP driven by Ferromagnetic core array
- Authors
- 정진욱
- Issue Date
- 19-Oct-2005
- Place
- SanJose
- Conference Name
- 58th Annual Gases Electronics Conference
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)