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Tantalum Pentachloride (TaCl5) 전구체를 활용한 ALD TaN 금속 박막 형성 및 분석
- Authors
- 최창환
- Issue Date
- 30-Oct-2020
- Publisher
- KIM
- Citation
- 대한금속재료학회 추계학술대회
- Conference Name
- 대한금속재료학회 추계학술대회
- Place
- Virtual Conference
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- There are no files associated with this item.
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)