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Characterization of inductively coupled plasma driven with ferrites cores at 400kHz
- Authors
- 정진욱
- Issue Date
- 20-Jun-2005
- Place
- 몬테레이,CA, USA
- Conference Name
- IEEE International Conference on Plasma Science
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)