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유도 결합 플라즈마에서 비침투적 간접적인 이온 에너지 분포 측정
- Authors
- 정진욱
- Issue Date
- 22-Apr-2005
- Place
- 이화여자대학교
- Conference Name
- 한국물리학회
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)