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Electron kinetics in a dual inductively coupled palsma
- Authors
- 정진욱
- Issue Date
- 15-Nov-2004
- Publisher
- 미국물리학회
- Citation
- 미국물리학회 플라즈마 분과 학술대회
- Conference Name
- 미국물리학회 플라즈마 분과 학술대회
- Place
- 사바나, 조지아,미국
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)